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[Analysis Case] Observation of the Surface Morphology of ZnO Films

Capable of observing large-area surface shapes.

A scanning white light interferometer (optical interferometer) can perform high-precision, non-contact three-dimensional measurements of the surface shape of a sample with "high vertical (Z) resolution (0.1 nm) and a wide (X-Y) measurement field of view (50 μm to 4.2 mm)." It is capable of measuring up to a field of view of 4.2 mm × 4.2 mm.

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  • Scanning White Light Interferometer

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